JPS6250941B2 - - Google Patents

Info

Publication number
JPS6250941B2
JPS6250941B2 JP54156768A JP15676879A JPS6250941B2 JP S6250941 B2 JPS6250941 B2 JP S6250941B2 JP 54156768 A JP54156768 A JP 54156768A JP 15676879 A JP15676879 A JP 15676879A JP S6250941 B2 JPS6250941 B2 JP S6250941B2
Authority
JP
Japan
Prior art keywords
ion source
permanent magnet
generating section
side plate
polarity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54156768A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5679900A (en
Inventor
Yasuo Kamiide
Yasushi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15676879A priority Critical patent/JPS5679900A/ja
Publication of JPS5679900A publication Critical patent/JPS5679900A/ja
Publication of JPS6250941B2 publication Critical patent/JPS6250941B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
  • Particle Accelerators (AREA)
JP15676879A 1979-12-05 1979-12-05 Ion source Granted JPS5679900A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15676879A JPS5679900A (en) 1979-12-05 1979-12-05 Ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15676879A JPS5679900A (en) 1979-12-05 1979-12-05 Ion source

Publications (2)

Publication Number Publication Date
JPS5679900A JPS5679900A (en) 1981-06-30
JPS6250941B2 true JPS6250941B2 (en]) 1987-10-27

Family

ID=15634881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15676879A Granted JPS5679900A (en) 1979-12-05 1979-12-05 Ion source

Country Status (1)

Country Link
JP (1) JPS5679900A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58194300A (ja) * 1981-12-24 1983-11-12 株式会社日立製作所 中性粒子入射装置のイオン源
JPS6166869A (ja) * 1984-09-11 1986-04-05 Toshiba Corp Ｒｆ型イオン・エンジン
JPS62296332A (ja) * 1986-06-16 1987-12-23 Hitachi Ltd イオン源
JP2667826B2 (ja) * 1987-03-18 1997-10-27 株式会社日立製作所 マイクロ波多価イオン源
JPS6424338A (en) * 1987-07-17 1989-01-26 Nissin Electric Co Ltd Ion source

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device

Also Published As

Publication number Publication date
JPS5679900A (en) 1981-06-30

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